X-ray imaging at the diffraction limit.

Details X-ray imaging at the diffraction limit. X-ray imaging at the diffraction limit.

Oct 1991

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1991josaa...8.1614r&link_type=abstract

Journal of the Optical Society of America A, Vol. 8, No. 10, p. 1614 - 1621

Physics

Optics

3

Scientific paper

The authors tested the ability of normal-incidence, multilayer-coated X-ray optics to produce diffraction-limited images. The imaging performance at 14 nm of a spherical mirror substrate coated with a single metal layer was compared with that of the same substrate coated with a Mo-Si multilayer. A Foucault knife-edge test was used to quantify the image aberrations. The knife-edge data were fitted with a model based on Fresnel diffraction theory. The authors found that the multilayer coating introduced a measurable but small figure error to the optic; the change in figure was less than λ/16 peak to valley. They conclude that a properly deposited multilayer coating will not degrade the imaging performance of an optical system designed to operate at the diffraction limit.

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