Wide-range two-dimensional small rotation-angle measurement by use of fringe projection

Details Wide-range two-dimensional small rotation-angle measurement by use of fringe projection Wide-range two-dimensional small rotation-angle measurement by use of fringe projection

Jan 2005

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2005spie.5633..185s&link_type=abstract

Advanced Materials and Devices for Sensing and Imaging II. Edited by Wang, Anbo; Zhang, Yimo; Ishii, Yukihiro. Proceedings of

Physics

Scientific paper

A system for two-dimensional small rotation-angle measurement is proposed and demonstrated. Because the measurement is not conducted by the interference but the fringe projection, it is basically robust for the external disturbance. While the setup is very simple, there is no requirement on the size of the object. We also proposed two-dimensional two-grating method and a unit that miniaturizes the system. Several measurements confirm us that the measurement accuracy of our proposed system is ~0.4 arcsec.

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