Wavelength-shifting interferometry by a wide tunable laser source with a new phase-shifting technique

Physics

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Scientific paper

A wavelength-shifting interferometer has been constructed by using a wide-tunable Ti:sapphire laser for three-dimensional range measurement. The phase shifts in five steps by wavelength changes can be measured with an Schwider-Hariharan algorithm in conjunction with sub-fringe measurements by PZT movements in four steps. Experimental results for a step object have been shown.

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