Wave-front analysis with high accuracy by use of a double-grating lateral shearing interferometer

Details Wave-front analysis with high accuracy by use of a double-grating lateral shearing interferometer Wave-front analysis with high accuracy by use of a double-grating lateral shearing interferometer

Nov 1996

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1996apopt..35.6151l&link_type=abstract

Applied Optics, Volume 35, Issue 31, November 1, 1996, pp.6151-6161

Physics

Optics

16

Atmospheric And Ocean Optics, Gratings, Instrumentation: Measurement: And Metrology, Interferometry, Phase Stepping, Wave-Front Sensing

Scientific paper

A phase-stepped double-grating lateral shearing interferometer to be used for wave-front analysis is presented. The resulting interference patterns are analyzed with a differential Zernike polynomial matrix-inversion method. Possible error sources are analyzed in the design stage, and it is shown that the inaccuracy can be kept within 2-5 m lambda rms. The apparatus was tested and evaluated in practice. Comparison with a phase-stepped Twyman-Green interferometer demonstrates that the accuracy of the two methods is comparable. Lateral shearing interferometry scores better on reproducibility, owing to the stability and robustness of the method.

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