Void formation and dust cloud structure in (a)symmetric RF discharges

Physics

Scientific paper

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Dusty Plasmas, High-Frequency Discharges, Voids (Solid), Dusty Or Complex Plasmas, Plasma Crystals, High-Frequency And Rf Discharges

Scientific paper

The behaviour of dust particles in a discharge is the result of the concerted action of the charging process and forces like gravity, the ion and neutral drag force, and the thermophoretic force. Since the ion drag force plays a major role, the reactor geometry and the ion density profile are important parameters. In this paper we study the influence of the geometrical features of a radio-frequency discharge, such as asymmetry, ring electrodes, and a depression in the electrodes.

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