Uncooled 160×120 microbolometer IR FPA based on sol-gel VOx

Details Uncooled 160×120 microbolometer IR FPA based on sol-gel VOx Uncooled 160×120 microbolometer IR FPA based on sol-gel VOx

Sep 2005

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2005spie.5957..340d&link_type=abstract

Integrated Optics: Theory and Applications. Edited by Pustelny, Tadeusz; Lambeck, Paul V.; Gorecki, Christophe. Proceedings of

Physics

Optics

5

Scientific paper

The technology of high-quality microbolometer focal plane arrays (FPA) fabrication has been developed. Simple and cheap sol-gel technology of thermosensitive vanadium oxide layers preparation is underlain in its basis. Uncooled 160×120 microbolometer sensor assemblies for 8-14 microns spectral range have been fabricated. The paper brief outlines simple techniques to measure crosstalk, precision of FPA temperature stabilization and sensor assembly response time to infrared signal change. The noise equivalent temperature difference better than 100 mK has been achieved at frame rate 60 Hz and F/1 optics.

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