Ultraviolet Mirau correlation microscopy

Details Ultraviolet Mirau correlation microscopy Ultraviolet Mirau correlation microscopy

Apr 1997

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1997spie.2984...30c&link_type=abstract

Proc. SPIE Vol. 2984, p. 30-41, Three-Dimensional Microscopy: Image Acquisition and Processing IV, Carol J. Cogswell; Jose-Angel

Physics

Optics

Scientific paper

We report our work towards improving the resolution performance of a conventional Mirau correlation microscope (MCM) by operating in the UV. We have modified the Mirau interferometer with the introduction of new thin-film beamsplitters that are nonattenuative in the ultra-violet, and new interferometer structure that can be made to work with short working distance objectives. Along with special UV optics, the new MCM can be made to operate in the ultra- violet region. By operating at 248 nm mercury line, the expected resolution improvement in both transverse and depth directions should be nearly doubled. A fully working MCM UV system at 325 nm is described in detail, and demonstrates the feasibility for a 248 nm system once a high quality 248 nm objective becomes available.

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