Tungsten-beryllium multilayer mirrors for soft X rays

Details Tungsten-beryllium multilayer mirrors for soft X rays Tungsten-beryllium multilayer mirrors for soft X rays

Sep 1988

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1988apopt..27.3933u&link_type=abstract

Applied Optics (ISSN 0003-6935), vol. 27, Sept. 15, 1988, p. 3933-3936.

Physics

Optics

7

Beryllium Compounds, Laminates, Mirrors, Tungsten Compounds, X Ray Diffraction, Photolithography, Reflectance, Surface Roughness, X Ray Spectroscopy

Scientific paper

Multilayer structures of tungsten and beryllium were synthesized onto flat silicon single-crystal substrates by the neutral atom beam sputtering technique. Structures of constituent tungsten and beryllium thin films were evaluated. The standard deviation of the interface roughness of the multilayer was estimated to be about 2.5 A. Reflectivities of multilayer mirrors were measured at a grazing incidence of 5.0 deg. The observed reflectivity of 30 percent at 1055 eV was in good agreement with the calculated value considering the interface roughness and oxygen contamination for a tungsten-beryllium structure having a period of 77.0 A.

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