Theoretical and experimental study of ion flux formation in an asymmetric high-frequency capacitive discharge

Details Theoretical and experimental study of ion flux formation in an asymmetric high-frequency capacitive discharge Theoretical and experimental study of ion flux formation in an asymmetric high-frequency capacitive discharge

2010-06-29

arxiv.org/abs/1006.5521v1

Physics

Plasma Physics

7 pages, 12 figures

Scientific paper

Parameters of a high frequency capacitive discharge in argon in axially symmetric chambers of different geometries are studied in experiments and by means of two-dimensional kinetic modeling by the Particle-in-Cell method. It is demonstrated that a change in the ratio of the areas of the driven and grounded electrodes can substantially increase the ion energy on the electrode practically without disturbing the plasma parameters. Particular attention is paid to studying the self-bias voltage and the ion distribution function on the electrode for gas pressures ranging from 15 to 70 mTorr. The results of self-consistent calculations are in good agreement with experimental data.

Affiliated with

Also associated with

No associations

Rating

Theoretical and experimental study of ion flux formation in an asymmetric high-frequency capacitive discharge does not yet have a rating. At this time, there are no reviews or comments for this scientific paper.

If you have personal experience with Theoretical and experimental study of ion flux formation in an asymmetric high-frequency capacitive discharge, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Theoretical and experimental study of ion flux formation in an asymmetric high-frequency capacitive discharge will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFWR-SCP-O-314205