The soft X-ray to EUV performance of plane and concave Pt-Si multilayer mirrors.

Details The soft X-ray to EUV performance of plane and concave Pt-Si multilayer mirrors. The soft X-ray to EUV performance of plane and concave Pt-Si multilayer mirrors.

Apr 1989

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1989jmo....36..471e&link_type=abstract

Journal of Modern Optics, Vol. 36, No. 4, p. 471 - 481

Physics

Optics

Mirrors: Extreme Uv, Mirrors: X Rays

Scientific paper

The reflectivities of plane Pt-Si multilayer mirrors of various d spacings and layer thickness ratios have been measured as a funciton of angle, at wavelengths within the soft X-ray and EUV regions. The measured performance is compared with theory and the effect of heat treating the mirrors interpreted in terms of Pt film agglomeration. The imaging characteristics of a concave Pt-Si multilayer mirror are presented.

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