Physics – Optics
Scientific paper
Jan 1993
adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1993spie.1742..345w&link_type=abstract
In: Multilayer and grazing incidence X-ray/EUV optics for astronomy and projection lithography; Proceedings of the Meeting, San
Physics
Optics
Reflectometers, Standards, Synchrotron Radiation, Ultraviolet Reflection, X Ray Diffraction, Laminates, Mirrors, Optical Reflection, X Ray Sources
Scientific paper
In response to the metrology needs of the soft X-ray community, the National Institute of Standards and Technology (NIST) has initiated a program devoted to the characterization of multilayer coated optics in the 4-40 nm wavelength region. In this paper, we describe the synchrotron based XUV reflectometers in use and under construction at NIST. We review the characteristics of the Synchrotron Ultraviolet Radiation Facility storage ring (SURF II) discuss the capabilities of the existing reflectometry facility, and present the final design parameters, expected performance, and construction status of a new reflectometry beam line.
Lucatorto Thomas
Tarrio Charles
Watts Richard
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