The soft X-ray performance of plane and figured Ni-aC multilayer mirrors.

Details The soft X-ray performance of plane and figured Ni-aC multilayer mirrors. The soft X-ray performance of plane and figured Ni-aC multilayer mirrors.

Jul 1989

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1989spie.1160..188e&link_type=abstract

Conference on X-Ray/EUV Optics for Astronomy and Microscopy, p. 188 - 194

Physics

Optics

3

Mirrors: Coatings, X-Ray Telescopes: Coatings

Scientific paper

In multilayer assemblies consisting of alternating high and low absorption index materials the strongly absorbing (metal) component layer is usually micro-crystalline. The crystallite size influences the soft X-ray reflectivity of the stack by determining the effective reflecting area of the stack and the diffuse scattering contribution. The influence of the deposition parameters on the structure of ion-beam sputtered Ni and a-C films is described together with the associated multilayer soft X-ray reflectivity spectra as a function of sputtering energy, d-spacing and film thickness ratio.

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