The Realization of a Eximer Laser Source With High Intensity

Details The Realization of a Eximer Laser Source With High Intensity The Realization of a Eximer Laser Source With High Intensity

Publishing date

Apr 2007

URL

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2007aipc..899..337v&link_type=abstract

Journals

SIXTH INTERNATIONAL CONFERENCE OF THE BALKAN PHYSICAL UNION. AIP Conference Proceedings, Volume 899, pp. 337-338 (2007).

Science

Physics

Additional info 3

Gas Lasers Including Excimer And Metal-Vapor Lasers, Beam Characteristics: Profile, Intensity, And Power, Spatial Pattern Formation

Type

Scientific paper

Abstract

Eximer Lasers are gas Laser of diatomic molecules. The Laser source requested to be realized has KrF as eximer (the krypton is a rare gas and fluoride is a halogen). The atoms Kr and F are tied only when they are excited, while they are being separated when the molecule is unexcited. Partial pressures in the discharge room are : for Kr 160 mbar, and for F 4 mbar. A third gas such as neon (buffer gas) is inserted into the cell; its pressure is 3 bar. The main characteristics of this Laser source are: wavelength of emitted laser light: 248 nm; energy per one Laser impulse : 0,1 J; duration of a Laser impulse: 0,1 ns.

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