Physics – Optics
Scientific paper
Dec 2004
adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2004spie.5639..186l&link_type=abstract
Adaptive Optics and Applications III. Edited by Jiang, Wenhan; Suzuki, Yoshiji. Proceedings of the SPIE, Volume 5639, pp. 186-
Physics
Optics
Scientific paper
The voltage-decoupling model for a 37-channel micromachined membrane deformable mirror is established through theoretically and experimentally analyzing the fitting aberration of a continuous-surface deformable mirror. The function between voltage and displacement of an actuator, the linear superposing among the actuators for micromachined membrane deformable mirror are analyzed by means of the measured influence function of actuators. The fitting of the first 36-order Zernike mode is carried out. The analysis shows that micromachined membrane deformable mirror can be applied to correcting low order aberration. This research provides the basis and guideline for designing the adaptive optical system based on micromachined membrane deformable mirror, thus offers a theoretical basis and reference for the application of the deformable mirror.
Chen Kaiyou
Dai Yun
Duan Haifeng
Li Ende
Wang Haiying
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