The metalorganic chemical vapor deposition growth of HgCdTe on GaAs at 300 °C using diisopropyltelluride

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Chemical Vapor Deposition, Structure And Morphology, Thickness, Crystalline Orientation And Texture, Galvanomagnetic And Other Magnetotransport Effects

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HgCdTe was grown by the metalorganic chemical vapor deposition alloy process on (111)B CdTe/GaAs and (111)B CdTe substrates at 300 °C using diisopropyltelluride, dimethlycadmium, and elemental mercury. Excellent surface morphology and compositional uniformity were obtained at this temperature. Hall effect measurements indicate that n-type (111) HgCdTe with carrier concentration below 1015 cm-3 and good mobilities at 77 K can be obtained on GaAs substrates.

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