Physics
Scientific paper
Feb 2011
adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2011spie.7928e..20l&link_type=abstract
Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices X. Edited by Garcia-Blanco, Sonia; Ramesham,
Physics
Scientific paper
This paper presents the interference effect of two intersecting waves on a surface acoustic wave(SAW) devices. The SAW interference device consists of input-output interdigital transducers(IDTs) to transmit and receive a Rayleigh wave and two interference IDTs to transmit shear-horizontal(SH) waves. The SH-waves intersects perpendicularly and interferes with the Rayleigh wave at the delay line. We fabricated the SAW devices with center frequencies ranging from 40 MHz to 200 MHz on a 128° YX LiNbO3 wafer. The result of the characteristic test with a network analyzer shows that the frequency response between the input-output IDTs is shifted by the interference. The center frequency decreases as the magnitude of the interference wave increases, and the frequency shift is at its maximum when the frequency of the interference wave coincides with the center frequency of the interference IDTs. The two interference waves applied simultaneously make the interference effect about twice. Also, interference effect increases with the increase of the center frequency of the interference IDT. This interference effect of two intersecting SAWs is useful to eliminate the cross axis sensitivity in designing the SAW gyroscope based on the interference effect.
Lee Hyungkeun
Lee Keekeun
Oh Haekwan
Yang Sang Sik
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