The growth rate of Cd(x)Hg(1-x)Te grown by metalorganic chemical vapor deposition

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Crystal Growth, Mercury Cadmium Tellurides, Metalorganic Chemical Vapor Deposition, Vapor Phase Epitaxy, Chemical Composition, Flow Velocity, Infrared Detectors, Morphology, Reaction Kinetics

Scientific paper

Cd(x)Hg(1-x)Te epitaxial layers have been grown by metalorganic chemical vapor deposition on CdTe substrates oriented 0-4 deg off (100) toward the 0 0 -1 line type, using dimethylcadmium (DMCd), diisopropyltelluride (DIPTe), and elemental mercury (Hg). Typically the Cd(x)Hg(1-x)Te layers exhibited hillock densities of (1.5-3.0) x 10 exp 2/sq cm, and FWHM in XRD of 130-180 arcsec. The growth rate and the compositional ratio x, and their dependences on the flow rates of DIPTe and DMCd have been examined. By considering the growth mechanism in the light of these results, it is concluded that the growth involves the formation of an adduct.

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