Physics – Optics
Scientific paper
Dec 2005
adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2005optl...30.3186w&link_type=abstract
Optics Letters, Volume 30, Issue 23, pp. 3186-3188 (2005).
Physics
Optics
3
Terbium, Optical Multilayers, Periodic Structures, Reflectivity, Silicon Compounds, Transmission Electron Microscopy, Amorphous State, Annealing, Multilayers, Coatings, Thin Films, Optical Properties, X-Ray Optics, Astronomical Optics
Scientific paper
We have fabricated periodic multilayers that comprise either Si/Tb or SiC/Tb bilayers, designed to operate as narrowband reflective coatings near 60 nm wavelength in the extreme ultraviolet (EUV). We find peak reflectance values in excess of 20% near normal incidence. The spectral bandpass of the best Si/Tb multilayer was measured to be 6.5 nm full width at half-maximum (FWHM), while SiC/Tb multilayers have a more broad response, of order 9.4 nm FWHM. Transmission electron microscopy analysis of Si/Tb multilayers reveals polycrystalline Tb layers, amorphous Si layers, and relatively large asymmetric amorphous interlayers. Thermal annealing experiments indicate excellent stability to 100°C (1 h) for Si/Tb. These new multilayer coatings have the potential for use in normal incidence instrumentation in a region of the EUV where efficient narrowband multilayers have not been available until now. In particular, reflective Si/Tb multilayers can be used for solar physics applications where the coatings can be tuned to important emission lines such as O V near 63.0 nm and Mg X near 61.0 nm.
Kjornrattanawanich Benjawan
Seely John F.
Uspenskii Yu. A.
Windt David L.
No associations
LandOfFree
Terbium-based extreme ultraviolet multilayers does not yet have a rating. At this time, there are no reviews or comments for this scientific paper.
If you have personal experience with Terbium-based extreme ultraviolet multilayers, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Terbium-based extreme ultraviolet multilayers will most certainly appreciate the feedback.
Profile ID: LFWR-SCP-O-1467078