Technology for Production of Ultra-Thin Crystal Silicon Membranes

Details Technology for Production of Ultra-Thin Crystal Silicon Membranes Technology for Production of Ultra-Thin Crystal Silicon Membranes

2005-08-12

arxiv.org/abs/physics/0508079v1

Vyssotsky V.B., Lobko E.V., Lobko A.S. // Proc. 5th Intl. Conf. ''Education, Industry, International Relation'', Minsk-2004, p

Physics

Instrumentation and Detectors

3 pages, 2 figures

Scientific paper

Ultra-thin crystal targets in shape of self-supporting membranes were produced for our experiments with parametric x-rays emitted by low-energy electrons. Concise description of the technology developed for production of silicon crystal membranes and the technique for the membrane thickness measurements are considered in the paper. Membrane thickness of ~0.5 micron at 1.0 mm diameter supporting by 2x2 mm silicon substrate of ~200 microns thickness is achieved. Developed technology for thin crystal membrane production can also be applied for manufacturing of various membrane-containing sensors

Affiliated with

Also associated with

No associations

Rating

Technology for Production of Ultra-Thin Crystal Silicon Membranes does not yet have a rating. At this time, there are no reviews or comments for this scientific paper.

If you have personal experience with Technology for Production of Ultra-Thin Crystal Silicon Membranes, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Technology for Production of Ultra-Thin Crystal Silicon Membranes will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFWR-SCP-O-38459