Technology and applications of micromachined silicon adaptive mirrors

Details Technology and applications of micromachined silicon adaptive mirrors Technology and applications of micromachined silicon adaptive mirrors

May 1997

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1997opten..36.1382v&link_type=abstract

Optical Engineering 36(05), 1382-1390, Brian J. Thompson; Ed.

Physics

20

Scientific paper

The technology of low-cost high-quality micromachined adaptive mirrors is reported. Adaptive mirrors are fabricated by combining bulk silicon micromachining with standard electronics technologies. Mirrors with tens of control channels, having RMS initial deviation from plane of the order of lambda/20 and a range of surface deflection of 10 to 20 micrometers with linear frequency response in the range of 50 Hz to 1 kHz, are fabricated on standard PCB substrates. Advanced devices with hundreds of control channels, demanding integration of driver and switching electronics, are currently under development.

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