System for measurement of CCD parameters

Details System for measurement of CCD parameters System for measurement of CCD parameters

Aug 1998

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1998spie.3553..297z&link_type=abstract

Proc. SPIE Vol. 3553, p. 297-301, Detectors, Focal Plane Arrays, and Imaging Devices II, Pingzhi Liang; Marc Wigdor; William G.

Physics

Scientific paper

This paper presents a system for measurement of CCD parameters that combines a photo-injection system and auto- focus systems. In the photo-injection system, a reverse microscope with plano-achromatic objective is used to produce a small light spot of (Phi) 2 micrometers . In the auto- focus system, astigmatic auto-focus method is applied. The auto-focus signal is detected by a simulation quadrate simulated by CCD. A piezoelectric transducer with high sensitivity and resolution is used to drive the focusing objective for a real-time control of the position of the small light spot which was required to be injected into one of pixels of CCD measured.

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