Synthesis and Deposition of Nanoparticles Using a Hypersonically Expanded Plasma

Details Synthesis and Deposition of Nanoparticles Using a Hypersonically Expanded Plasma Synthesis and Deposition of Nanoparticles Using a Hypersonically Expanded Plasma

Oct 2005

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2005aipc..799..514h&link_type=abstract

NEW VISTAS IN DUSTY PLASMAS: Fourth International Conference on the Physics of Dusty Plasmas. AIP Conference Proceedings, Volum

Physics

Nanotechnology, Plasma Deposition, Nanostructured Materials, Coatings, Ultrasonics, Particle Size Measurement, Methods Of Nanofabrication And Processing, Plasma-Based Ion Implantation And Deposition, Nanoscale Materials And Structures: Fabrication And Characterization

Scientific paper

Si-Ti-N nanostructured coatings were synthesized by inertial impaction of nanoparticles using a process called hypersonic plasma particle deposition (HPPD). Transmission electron microscopy on samples prepared by focused ion beam (FIB) milling show TiN nanocrystallites in an amorphous matrix. X-ray photoelectron spectroscopy results indicate the presence of amorphous Si3N4 in similar films. In-situ particle size distribution measurements show that particle size distributions peak around 14 nm under typical operating conditions.

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