Surface roughness and oxide layers of sputtered polycrystalline films

Details Surface roughness and oxide layers of sputtered polycrystalline films Surface roughness and oxide layers of sputtered polycrystalline films

Jul 1989

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1989spie.1160...26r&link_type=toc

Proc. SPIE Vol. 1160, p. 26-0, X-Ray/EUV Optics for Astronomy and Microscopy, Richard B. Hoover; Ed.

Physics

Optics

3

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