Other
Scientific paper
Dec 2003
adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2003spie.5209..148r&link_type=abstract
Materials for Infrared Detectors III. Edited by Longshore, Randolph E.; Sivananthan, Sivalingam. Proceedings of the SPIE, Volum
Other
Scientific paper
We have developed surface micromachined Infrared ray (IR) focal plane array (FPA), in which single SiO2 layer works as an IR absorbing plate and Pb(Zr0.3Ti0.7)O3 thin film served as a thermally sensitive material. There are some advantages of applying SiO2 layer as an IR absorbing layer. First of all, the SiO2 has good IR absorbance within 8 ~ 12 μm spectrum range. Measured value showed about 60% absorbance of incident IR spectrum in the range. SiO2 layer has another important merit when applied to the top of Pt/PZT/Pt stack because it works also as a supporting membrane. Consequently, the IR absorbing layer forms one body with membrane structure, which simplifies the whole MEMS process and gives robustness to the structure.
Cho Seong-Mok
Kim Kwi-Dong
Ryu Sang-Ouk
Yoon Sung-Min
You In-Kyu
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