Physics
Scientific paper
Apr 2000
adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2000nimpa.444..145w&link_type=abstract
Nuclear Instruments and Methods in Physics Research Section A, Volume 444, Issue 1-2, p. 145-150.
Physics
30
Scientific paper
We describe the operation and performance of a prototype microcalorimeter ``energy-dispersive'' (non-dispersive) X-ray spectrometer (μcal EDS) developed at NIST for use in X-ray microanalysis and X-ray astronomy. The low-energy microcalorimeter detector, consisting of an Al-Ag bilayer superconducting transition-edge sensor (TES) in thermal contact with a Bi X-ray absorber, is designed for operation in the energy range from 0-2keV and is fabricated using a shadow-mask lithographic process. The TES microcalorimeter is cooled by a compact adiabatic demagnetization refrigerator and is mounted on a scanning electron microscope. This device achieves a best energy resolution of 2.0+/-0.1eV at 1.5keV, as determined from the analysis of digitized X-ray spectra of a complex glass containing many elements.
Bergren N. F.
Deiker Steve
Hilton Gene C.
Irwin Kent D.
Martinis John M.
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