Sputter deposition of metal multilayers

Details Sputter deposition of metal multilayers Sputter deposition of metal multilayers

Oct 1989

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1989spie.1140..453s&link_type=toc

Proc. SPIE Vol. 1140, p. 453-0, X-Ray Instrumentation in Medicine and Biology, Plasma Physics, Astrophysics, and Synchrotron Rad

Physics

Plasma Physics

1

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