Spectroscopic Ellipsometry of Gold Clusters Embedded in Thin Dielectric Films

Physics

Scientific paper

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Dielectric Thin Films, Composite Materials, Optical Constants

Scientific paper

Thin dielectric films of different materials (SiO2 and Al2O3) with embedded gold nanoclusters were deposited by magnetron co-sputtering. The influence of the gold nanoclusters concentration and the host matrix material on the optical response of the system was studied by spectroscopic ellipsometry (SE) in the 450 nm÷700 nm spectral range.

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