Some developments for a unit magnification catadioptric optical system

Details Some developments for a unit magnification catadioptric optical system Some developments for a unit magnification catadioptric optical system

Mar 1995

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1995apopt..34.1203z&link_type=abstract

Applied Optics, Volume 34, Issue 7, March 1, 1995, pp.1203-1208

Physics

Optics

Lithography: Projection, Lenses, Optical Design, Imaging Systems

Scientific paper

Some structural improvements in the 1:1 Wynne-Dyson catadioptric system
are described. The improvements make the 1:1 Wynne-Dyson system usable
in the deep-UV regime and broad bands and high numerical apertures
become possible.

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