Soft x-ray (2 to 6 keV) spectroscopy using gratings at extreme grazing incidence

Details Soft x-ray (2 to 6 keV) spectroscopy using gratings at extreme grazing incidence Soft x-ray (2 to 6 keV) spectroscopy using gratings at extreme grazing incidence

Jul 1996

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1996spie.2805..260b&link_type=abstract

Proc. SPIE Vol. 2805, p. 260-266, Multilayer and Grazing Incidence X-Ray/EUV Optics III, Richard B. Hoover; Arthur B. Walker; Ed

Physics

Optics

3

Scientific paper

In soft x-ray spectroscopy the region from 2 to 6 keV is the most critical, because crystal properties are not so good as at higher energies and optical gratings become inefficient. We have investigated the performances of ion etched blazes gratings as components for soft x-ray spectroscopy. The gratings were mounted in a Rowland geometry at angels of incidence varying from 89 degrees to 89.45 degrees. As source, we used a microfocus soft x-ray source and as detector an uncoated channel electron multiplier (CEM) sliding along the Rowland circle to scan the spectrum. We recorded several spectra between 50 eV and 6 keV and among them the L lines of Zr, Mo, Pd and the K lines of Ti, Cr, Fe. The spectral resolution obtained shows essentially almost slit limited line widths. The diffraction efficiency ranges from 1 to 3 percent at 89.35 degrees and up to 4.2 percent at 89 degrees. This experiment proves that it is possible to extend the classical spectroscopic techniques to the soft x-ray region.

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