"Smart" high-precision microposition feedback control device: theory and experiment

Details "Smart" high-precision microposition feedback control device: theory and experiment "Smart" high-precision microposition feedback control device: theory and experiment

Oct 1990

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1990spie.1303..129t&link_type=toc

Proc. SPIE Vol. 1303, p. 129-139, Advances in Optical Structure Systems, John Breakwell; Victor L. Genberg; Gary C. Krumweide; E

Physics

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