Silicon Waveguides and Ring Resonators at 5.5 μm

Details Silicon Waveguides and Ring Resonators at 5.5 μm Silicon Waveguides and Ring Resonators at 5.5 μm

2010-08-17

arxiv.org/abs/1008.2978v1

Physics

Optics

4 pages, 4 figures, includes supplemental materials

Scientific paper

We demonstrate low loss ridge waveguides and the first ring resonators for
the mid-infrared, for wavelengths ranging from 5.4 to 5.6 {\mu}m. Structures
were fabricated using electron-beam lithography on the silicon-on-sapphire
material system. Waveguide losses of 4.0 +/- 0.7 dB/cm are achieved, as well as
Q-values of 3.0 k.

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