Silicon integrated optic devices and micromechanical sensors based on ARROW

Details Silicon integrated optic devices and micromechanical sensors based on ARROW Silicon integrated optic devices and micromechanical sensors based on ARROW

Mar 1996

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1996spie.2686....2n&link_type=abstract

Proc. SPIE Vol. 2686, p. 2-16, Integrated Optics and Microstructures III, Massood Tabib-Azar; Ed.

Physics

Optics

Scientific paper

We review the design and fabrication considerations of the antiresonant reflecting optical waveguide (AR-ROW), including materials selection for IC and MEMS compatibility, and present a variety of IO devices and sensors based on the ARROW which we have developed, along with pertinent CAD tools. Examples presented include: directional couplers, thermo- optic modulators, and Mach-Zehnder interferometers (MZI), including micromachined MZIs for detection of mechanical signals.

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