Silicon-based micromechanical structures and devices

Details Silicon-based micromechanical structures and devices Silicon-based micromechanical structures and devices

Nov 1989

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1989spie.1167..137g&link_type=toc

Proc. SPIE Vol. 1167, p. 137-0, Precision Engineering and Optomechanics, Daniel Vukobratovich; Ed.

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