SiC/Tb and Si/Tb multilayer coatings for extreme ultraviolet solar imaging

Details SiC/Tb and Si/Tb multilayer coatings for extreme ultraviolet solar imaging SiC/Tb and Si/Tb multilayer coatings for extreme ultraviolet solar imaging

Mar 2006

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2006apopt..45.1765k&link_type=abstract

Applied Optics IP, vol. 45, Issue 8, pp.1765-1772

Physics

Optics

8

Multilayers, Coatings, Thin Films, Optical Properties, X-Ray Optics, Astronomical Optics

Scientific paper

Narrowband SiC/Tb and Si/Tb multilayers are fabricated with as much as a 23% normal-incidence reflectance near a 60 nm wavelength and spectral bandpass (FWHM) values of 9.4 and 6.5 nm, respectively. The structural properties of the films are investigated using extreme ultraviolet and x-ray reflectometry and transmission electron microscopy. Thermal stability is investigated in films annealed to as high as 300 °C. Because of their superior thermal stability, relatively high reflectance, and narrower spectral bandpass, Si/Tb multilayers are identified as optimal candidates for solar physics imaging applications, where the peak response can be tuned to important emission lines such as O v near 63.0 nm and Mg x near 61.0 nm. We describe our experimental procedures and results, discuss the implications of our findings, and outline prospects for improved performance.

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