Roughness measurement of X-ray mirror surfaces

Details Roughness measurement of X-ray mirror surfaces Roughness measurement of X-ray mirror surfaces

Sep 1986

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1986jajap..25.1292k&link_type=abstract

Japanese Journal of Applied Physics, Part 1 (ISSN 0021-4922), vol. 25, Sept. 1986, p. 1292-1299.

Physics

23

Angular Distribution, Mirrors, Power Spectra, Surface Roughness, X Ray Scattering, X Ray Telescopes, Fourier Transformation, Glass, Gold, Silicon

Scientific paper

In order to fabricate an X-ray mirror telescope the roughness of mirror surfaces was investigated using X-ray scattering. The scattering profiles of plate glass were measured with Al-K (8.34-A) X-rays. The spectral structure of surface roughness was revealed by the angular distribution of the X-ray scattering. The power-spectral density functions of the surface-height distribution for these materials (except for a gold evaporated surface) were represented by power-law spectra with power indices ranging from -1 to -2. The rms heights were derived to be 1.8-8.3 A for a wavelength range as expected from the power-law spectrum. The results obtained with this method were found to be consistent with those with an ordinary optical profilometer.

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