REVIEW: Manufacturing techniques for complex shapes with submicron accuracy

Details REVIEW: Manufacturing techniques for complex shapes with submicron accuracy REVIEW: Manufacturing techniques for complex shapes with submicron accuracy

Aug 1990

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1990rpph...53.1049f&link_type=ejournal

Reports on Progress in Physics, Volume 53, Issue 8, pp. 1049-1094 (1990).

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