Quantitative mass and energy dispersive elastic recoil spectrometry: Resolution and efficiency considerations

Details Quantitative mass and energy dispersive elastic recoil spectrometry: Resolution and efficiency considerations Quantitative mass and energy dispersive elastic recoil spectrometry: Resolution and efficiency considerations

Jul 1987

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1987nimpb..27..448w&link_type=abstract

Nuclear Instruments and Methods in Physics Research Section B, Volume 27, Issue 3, p. 448-457.

Physics

71

Scientific paper

A time of flight-energy recoil telescope system for mass and energy dispersive recoil spectrometry has been applied to study the formation of Mg2Si layers and depth profiling of Ga1-xAlxAs quantum well structures. Measurements of the energy (depth) dependence of the mass resolution showed that the telescope could be used over the energy range from 5 to 18 MeV to distinguish between recoils of 1 amu mass difference up to mass 28 amu. The energy dependence of the detection efficiency was found to be independent of the recoil energy for 12C and 28Si recoils and no strong evidence for a recoil species dependence of the detection efficiency for recoils heavier than 16O was found.

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