Pyramidal micro-mirrors for microsystems and atom chips

Physics – Atomic Physics

Scientific paper

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4 pages, 5 figures

Scientific paper

10.1063/1.2172412

Concave pyramids are created in the (100) surface of a silicon wafer by anisotropic etching in potassium hydroxide. High quality micro-mirrors are then formed by sputtering gold onto the smooth silicon (111) faces of the pyramids. These mirrors show great promise as high quality optical devices suitable for integration into MOEMS and atom chips. We have shown that structures of this shape can be used to laser-cool and hold atoms in a magneto-optical trap.

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