Production of ultrasmooth electroform-replica mirrors for multilayer optics

Details Production of ultrasmooth electroform-replica mirrors for multilayer optics Production of ultrasmooth electroform-replica mirrors for multilayer optics

Feb 1994

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1994spie.2011..100u&link_type=abstract

Proc. SPIE Vol. 2011, p. 100-106, Multilayer and Grazing Incidence X-Ray/EUV Optics II, Richard B. Hoover; Arthur B. Walker; Eds

Physics

Optics

Scientific paper

We describe the fabrication of smooth electroformed replicas from gold-coated ceramic and lacquer-polished glass mandrels. We show that lowering the temperature of the plating both improves the surface quality of replicas produced from lacquer-polished substrates, although not to the levels that can be achieved using ceramic substrates. The low surface roughness and high ductility of electroforms make them attractive alternatives to conventional silicon and mica substrates for the production of bent and conformable multilayer optics. We describe preliminary work on multilayer coating an electroform produced from a sapphire master.

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