Physics – Optics
Scientific paper
Oct 1990
adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1990spie.1303..178m&link_type=abstract
IN: Advances in optical structure systems; Proceedings of the Meeting, Orlando, FL, Apr. 16-19, 1990 (A91-36651 15-74). Bellingh
Physics
Optics
1
Asphericity, Computer Aided Design, Machine Tools, Optical Equipment, Polishing, Pressure Distribution, Computer Aided Manufacturing, Surface Treatment, Wear Resistance
Scientific paper
The paper presents a mathematical model, based on Kirchoff's thin flat plate theory, developed to determine polishing pressure distribution for a flexible polishing tool. A two-layered tool in which bending and compressive stiffnesses are equal is developed, which is formulated as a plate on a linearly elastic foundation. An equivalent eigenvalue problem and solution for a free-free plate are created from the plate formulation. For aspheric, anamorphic optical surfaces, the tool misfit is derived; it is defined as the result of movement from the initial perfect fit on the optic to any other position. The Polisher Design (POD) software for circular tools on aspheric optics is introduced. NASTRAN-based finite element analysis results are compared with the POD software, showing high correlation. By employing existing free-free eigenvalues and eigenfunctions, the work may be extended to rectangular polishing tools as well.
Hufnagel Robert E.
Mehta Pravin K.
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