Physics – Optics
Scientific paper
Feb 2010
adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2010spie.7595e...9h&link_type=abstract
MEMS Adaptive Optics IV. Edited by Olivier, Scot S.; Bifano, Thomas G.; Kubby, Joel A. Proceedings of the SPIE, Volume 7595,
Physics
Optics
Scientific paper
Compensating for atmospheric turbulence in meter-class telescopes and for free-space communications can require deformable mirrors (DM) with hundreds of actuators. Advances in high-contrast imaging techniques and increased telescope sizes require DMs mirrors with thousands of actuators [1]-[3]. In response to these needs, Iris AO has been developing a nearly 500-actuator DM and is conducting pathfinding research into 3000-actuator class DMs. This paper begins with an overview of the segmented DM design and describes improvements made to the DM over the prior year in the areas of speed, high-quality dielectric coatings, and snap-in prevention structures. The paper then describes the next-generation PTT489 DM design and fabrication process. Failure modes encountered during fabrication are presented as well as test methods to detect the failure modes. Preliminary yield data are presented for the fabrication process as well. The paper concludes with a view to the future showing pathfinding research into 3000-actuator DMs.
He Min
Helmbrecht Michael A.
Kempf Carl J.
Rhodes Patrick
No associations
LandOfFree
Preliminary results of large-actuator-count MEMS DM development does not yet have a rating. At this time, there are no reviews or comments for this scientific paper.
If you have personal experience with Preliminary results of large-actuator-count MEMS DM development, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Preliminary results of large-actuator-count MEMS DM development will most certainly appreciate the feedback.
Profile ID: LFWR-SCP-O-1427523