Precision Displacement Measurement based on Phase Measuring Deflectometry

Physics – Optics

Scientific paper

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Phase Measurement, Charge-Coupled Devices, Fourier Transform Optics, Pattern Recognition, Image Processing, Phase Retrieval, Optical Elements, Devices, And Systems, Fourier Optics, Pattern Recognition, Image Forming And Processing

Scientific paper

In the paper we present a new method to measure the movement displacement, which is easy to use, cheap and can reach micro-resolution as well as large travel range. It is based on Phase Measuring Deflectometry (PMD) technique. The measurement system consists of standard sinusoidal fringe pattern, standard planar mirror and a CCD camera. The standard planar mirror is mounted on a translation object. The CCD camera will capture the standard sinusoidal fringe pattern via the mirror. And the phase distributions will be extracted by Fourier Transformation Technique, and then the displacement will be calculated by the known mapping table between the phase distributions and displacements. Both the computer simulation and experimental data confirm the feasibility of this method. It is promising to use in high-precision displacement measurement.

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