Physics – Optics
Scientific paper
Jul 1996
adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1996spie.2805..254k&link_type=abstract
Proc. SPIE Vol. 2805, p. 254-259, Multilayer and Grazing Incidence X-Ray/EUV Optics III, Richard B. Hoover; Arthur B. Walker; Ed
Physics
Optics
Scientific paper
Multilayer carbon interference structures (MCIS) obtained by interleaving hydrogenated carbon layers were studied. MCIS with period from 115 A down to 20 A were obtained by ion- plasma methods. MCIS parameters in the wavelength range 1.54 Q-44.7 A were studied using x-ray diffraction methods. With the help of a two-crystal spectrometer the MCIS rocking curves for the first Bragg peak were measured. The relations R equals f((Theta) ) were calculated for various wavelengths. The differences between experimental and theoretical results are discussed. It is shown that the use of MCIS leads to the same high resolution as that of KAP crystals. The parameters were calculated for the MCIS that are expected to have a reflection coefficient of up to 70 percent at (lambda) equals 1.54 A and a resolution several times greater than that of the traditional Me/C-structures.
Baranov Alexander M.
Ivanovsky G. F.
Kondrashov Pavel E.
Novoselova E. G.
Smirnov Igor S.
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