Polyatomic-ion implanation damage in silicon

Details Polyatomic-ion implanation damage in silicon Polyatomic-ion implanation damage in silicon

Jun 1975

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1975phrvl..34.1441d&link_type=ejournal

Physical Review Letters, Volume 34, Issue 23, June 9, 1975, pp.1441-1444

Physics

15

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