Plasma synthesis of single crystal silicon nanoparticles for novel electronic device applications

Details Plasma synthesis of single crystal silicon nanoparticles for novel electronic device applications Plasma synthesis of single crystal silicon nanoparticles for novel electronic device applications

2004-10-06

arxiv.org/abs/physics/0410038v1

Physics

Plasma Physics

accepted for publication in Plasma Physics and Controlled Fusion, scheduled for Dec. 2004 Fu

Scientific paper

10.1088/0741-3335/46/12B/009

Single-crystal nanoparticles of silicon, several tens of nm in diameter, may be suitable as building blocks for single-nanoparticle electronic devices. Previous studies of nanoparticles produced in low-pressure plasmas have demonstrated the synthesis nanocrystals of 2-10 nm diameter but larger particles were amorphous or polycrystalline. This work reports the use of a constricted, filamentary capacitively coupled low-pressure plasma to produce single-crystal silicon nanoparticles with diameters between 20-80 nm. Particles are highly oriented with predominant cubic shape. The particle size distribution is rather monodisperse. Electron microscopy studies confirm that the nanoparticles are highly oriented diamond-cubic silicon.

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