Photometer for measuring the parameters of antireflection coatings.

Details Photometer for measuring the parameters of antireflection coatings. Photometer for measuring the parameters of antireflection coatings.

Nov 1989

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1989svjot..56..686b&link_type=abstract

Sov. J. Opt. Technol., Vol. 56, No. 11, p. 686 - 687

Physics

Scientific paper

A device and method are described that make it possible to perform rapid measurements of the optical thickness and refractive index of thin films on an opaque substrate over fairly wide ranges (optical thickness from 100 to 225 nm and refractive index from 1.5 to 5.5), integrated over the area of a 20 - 30 mm diameter circle. On the basis of the described apparatus it is possible to build an automated instrument for monitoring antireflection coating quality during production.

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