Phase shifting interferometric imaging ellipsometer

Details Phase shifting interferometric imaging ellipsometer Phase shifting interferometric imaging ellipsometer

Oct 1997

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1997spie.3121...13w&link_type=abstract

Proc. SPIE Vol. 3121, p. 13-18, Polarization: Measurement, Analysis, and Remote Sensing, Dennis H. Goldstein; Russell A. Chipman

Physics

Optics

Scientific paper

An imaging ellipsometer has been developed which employs phase shifting interferometry to characterize the ellipsometric parameters. Polarized light from a laser or incoherent source is collimated and reflected off of the surface under test. A modified Michelson interferometer is used in conjunction with a Wollaston prism to generate two interferograms with orthogonal polarization states. Subtraction of the phases in the two interferograms yields the ellipsometric parameter (Delta) . The fringe modulation of the two interferograms is used to calculate the ellipsometric parameter (Psi) . The instrument uses imaging optics to image the surface under test to a CCd, yielding a truly two dimensional ellipsometric measurement. The deign of the instrument and result of measurement will be presented.

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