Performance of multilayer-coated figured optics for soft X-rays near the diffraction limit

Details Performance of multilayer-coated figured optics for soft X-rays near the diffraction limit Performance of multilayer-coated figured optics for soft X-rays near the diffraction limit

Feb 1991

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1991spie.1343..104r&link_type=abstract

IN: X-ray/EUV optics for astronomy, microscopy, polarimetry, and projection lithography; Proceedings of the Meeting, San Diego,

Physics

Optics

Coatings, Diffraction, Mirrors, Optical Materials, Thin Films, X Ray Imagery, Gold Alloys, Imaging Techniques, Palladium Alloys

Scientific paper

The imaging performance of a spherical mirror was measured at 14nm. A Foucault knife-edge test was used to determine the focal spot size formed by a 400 mm radius mirror at a numerical aperture of 0.04. The image formed by the mirror is compared with a single-layer AuPd coating is compared with that formed when coated with a Mo/Si multilayer. By fitting the results with a diffraction model, it is possible to quantify the change in effective surface figure caused by the multilayer. It is concluded that a multilayer-coated mirror can perform at the diffraction limit under certain conditions.

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