Physics
Scientific paper
Jul 2000
adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2000spie.4003..303d&link_type=abstract
Proc. SPIE Vol. 4003, p. 303-310, Optical Design, Materials, Fabrication, and Maintenance, Philippe Dierickx; Ed.
Physics
1
Scientific paper
The design, parameters and the amplitude-frequency analysis of the new
magnetic rheology (MR) drive are presented. The combination of
hydrostatic carrier, MR hydraulic loop control, elastic thin wall seal
joined in a single unit ensures small positioning error nm and small
time of response T
Deulin Eugeni A.
Eliseev Oleg N.
Mikhailov Valeri P.
Sytchev Victor V.
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