Overlay Alignment Using Two Photonic Crystals

Details Overlay Alignment Using Two Photonic Crystals Overlay Alignment Using Two Photonic Crystals

2005-12-08

arxiv.org/abs/physics/0512073v1

Physics

Optics

13pages 6 figures

Scientific paper

In this paper we proposed a novel overlay alignment method using two sets of identical photonic crystals (PhCs). In this method the reflection or transmission spectrum of the two overlaid photonic crystals is measured to help wafer tilt, yaw rotation, and translation aligning. The initial testing results with two 1D photonic crystals and analysis of the alignment accuracy are presented. This method is particularly useful in building photonic crystal stacks with nanoimprint lithography (NIL).

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